STI - iFocus Wafer Inspection Machine
Wafer Inspection System For Frame & Whole Wafer
STI’s iFocus is a highly intelligent precision wafer inspection system that offers a comprehensive solution for the inspection of frame and/or whole wafer.
Using STI’s proprietary On-The-Fly (OTFTM) vision, the iFocus can be configured to detect any type of micro defects arising from wafer processing, post dicing or packing.
The OTFTM optical system encompasses pioneering technology in areas such as optics and illumination design, 2D, 3D and active die inspection algorithms. Patented Simultaneous Dual Illumination Image Capture Technology is used to eliminate escape and reduce overkill without compromising throughput.Features
- Dual Arms Robotic Handling
- Dual Camera 2D OTF Inspection and Metrology
- Colour Camera On-Line and Off-Line Defect Review
- Multiple Independently Configurable Illuminations
- Wafer Map Capability
- Wafer Top OCR Reader
- SPC Analysis Software
- Film Frame ID Bar Code Reader
- HEPA Filter